Lineavision® customizable metrology and characterization platform is designed to inspect and measure at highest precision on narrow or large areas at lab scale. The system provides advanced metrology capability for even complex processes, and is capable of analyzing single and multilayer surface structures for defining and assessing quality and process steps.
Lineavision® metrology and characterization platform is optimally suited for:
- Optical metrology for single and multi-layer product
- High accuracy motion in XY and Z direction
- High resolution measurements and analysis
- Pattern recognition software
- PDF comparison & pattern self-learning